SU-8 photoresist

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SU-8 Photoresist description

SU-8 is a commonly used negative photoresist. It is a very viscous polymer that can be spun or spread over a thickness ranging from 1 micrometer up to 2 millimeters and still be processed with standard mask aligner. Its maximum absorption is for ultraviolet light with a wavelength of around 360 nm. When exposed, SU-8's long molecular chains cross-link causing the solidification of the material.

SU-8 is mainly used in for fabrication of microfluidics and MEMS parts.

Links for SU-8

[THE SU8 HOMEPAGE]
[SU-8: Thick Photo-Resist for MEMS] A webpage with a lot of material data and process tricks.
[SU-8 supplier]

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